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    Geometrical Anatomy for Oxygen Vacancies in Epitaxial Hf0.5Zr0.5O2 Films Grown via Atomic Layer Deposition

    Geometrical Anatomy for Oxygen Vacancies in Epitaxial Hf0.5Zr0.5O2 Films Grown via Atomic Layer Deposition by Chihwan An, Jung Woo Cho, Tae Yoon Lee, Myeong Seop Song, Baekjune Kang, Hongju Kim, Jun Hee Lee, Changhee Sohn, Seung Chul Chae

    Published 2025-04-01
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