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    Dynamic characteristics of neutral beam etching enabled normally-off recessed-gate GaN MOSHEMT

    Dynamic characteristics of neutral beam etching enabled normally-off recessed-gate GaN MOSHEMT by Yitai Zhu, Haitao Du, Yu Zhang, Haolan Qu, Han Gao, Haodong Jiang, Wenhui Xu, Xin Ou, Xinbo Zou

    Published 2025-06-01
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