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    Piezoelectric Layer Transfer Process for MEMS

    Piezoelectric Layer Transfer Process for MEMS by Gwenael Le Rhun, Franklin Pavageau, Timothée Rotrou, Christel Dieppedale, Laurent Mollard

    Published 2024-03-01
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  2. 2
    Transparent PZT Capacitors on Glass for Actuating Applications

    Transparent PZT Capacitors on Glass for Actuating Applications by Franklin Pavageau, Christel Dieppedale, Kevin Benedetto, Christophe Licitra, Laurent Frey, Fabrice Casset, Gwenaël Le Rhun

    Published 2024-04-01
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