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Argon release, crystallization, morphological and optical changes of ion-beam sputtered Ta2O5 thin films during thermal treatments by A. Paolone, M. Bazzan, G. Favaro, F. Borondics, G. Nemeth, F. Capitani, S. Swaraj, R. Belkhou, R. Flammini, J. Teillon, C. Michel, D. Hofman, M. Granata
Published 2025-01-01
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