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    Influence of Substrate Bias Voltage on Structure and Properties of (AlCrMoNiTi)N Films

    Influence of Substrate Bias Voltage on Structure and Properties of (AlCrMoNiTi)N Films by Xue Gao, Bin Li, Yiman Zhao, Xunwang Shi, Yujie Chen, Bin Liao, Erzhou Ren

    Published 2024-12-01
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