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A 200 mm Wafer-Scale Al<sub>2</sub>O<sub>3</sub> Photonics Waveguide Technology for UV and Visible Applications by P. Neutens, E. Mafakheri, X. Zheng, P. Helin, Z. Jafari, C. Lin, G. Jeevanandam, Nga P. Pham, S. Fan, C. Su, R. Jansen, P. Van Dorpe, N. Le Thomas, C. Haffner
Published 2025-01-01Get full text
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