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    Structure of Silicon Wafers Planar Surface before and after Rapid Thermal Treatment

    Structure of Silicon Wafers Planar Surface before and after Rapid Thermal Treatment by U. A. Pilipenko, A. A. Sergeichik, D. V. Shestovski, V. A. Solodukha

    Published 2024-07-01
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  2. 2
    Spectral Ellipsometry as a Method of Investigation of Influence of Rapid Thermal Processing of Silicon Wafers on their Optical Characteristics

    Spectral Ellipsometry as a Method of Investigation of Influence of Rapid Thermal Processing of Silicon Wafers on their Optical Characteristics by V. A. Solodukha, U. A. Pilipenko, A. A. Omelchenko, D. V. Shestovski

    Published 2022-10-01
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