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Chang-Hyo Son
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Chang-Hyo Son
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Proposals for Next-Generation Eco-Friendly Non-Flammable Refrigerants for a −100 °C Semiconductor Etching Chiller Based on 4E (Energy, Exergy, Environmental, and Exergoeconomic) An...
by
Hye-In Jung
,
Chang-Hyo Son
,
Joon-Hyuk Lee
Published 2024-10-01
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2
A Novel Approach of −80 °C Cascade Refrigeration System Using Non-Flammable Quaternary Refrigerants for Semiconductor Process Applications
by
Su-Been Lee
,
Chang-Hyo Son
,
Joon-Hyuk Lee
Published 2024-12-01
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3
Enhancing Semiconductor Chiller Performance: Investigating the Performance Characteristics of Ultra-Low-Temperature Chillers Applying a Liquid Receiver
by
Joon-Hyuk Lee
,
Hye-In Jung
,
Su-Been Lee
,
Chang-Hyo Son
Published 2024-10-01
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