Effect of temperature and deposition power on microstructure and properties of magnetron sputtered thin AlN coatings by Vasilina Lapitskaya, Andrey Nikolaev, Anastasiya Khabarava, Evgeniy Sadyrin, Sergei Aizikovich, Anaid Azoyan, Dmitry Kotov, Sergei Chizhik, Guangbin Yu, Weifu Sun

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