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Formation of AlN Layers at Magnetron Sputtering of Aluminum in Ar + N2 Gas Mixture by A.S. Kornyushchenko
Published 2014-06-01Get full text
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Preparation of Zn Nanosystems and Some Peculiarities of Their Oxidation by V.M. Latyshev, A.S. Kornyushchenko, V.I. Perekrestov
Published 2014-11-01Get full text
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3
Formation of Silicon Carbide Films by Magnetron Sputtering of Compound Carbon-silicon Target by V.I. Perekrestov, A.S. Kornyushchenko, I.V. Zahaiko
Published 2015-06-01Get full text
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