COMPENSATION OF MEASUREMENT ERRORS WHEN REDUCING LINEAR DIMENSIONS OF THE KELVIN PROBE by A. K. Tyavlovsky, A. L. Zharin

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Universal Digital Probe Electrometer for Testing Semiconductor Wafers by A. L. Zharin, U. A. Mikitsevich, A. I. Svistun, K. U. Pantsialeyeu

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ANALYSIS OF SURFACE DEFECTS OF ALUMINUM AND ITS ALLOYS WITH A SCANNING KELVIN PROBE by A. K. Tyavlovsky, A. L. Zharin, O. K. Gusev, R. I. Varabei, N. I. Muhurov, G. V. Sharonov, K. U. Pantsialeyeu

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KELVIN PROBE’S STRAY CAPACITANCE AND NOISE SIMULATION by S. Danyluk, A. V. Dubanevich, O. K. Gusev, A. I. Svistun, A. K. Tyavlovsky, K. L. Tyavlovsky, R. I. Vorobey, A. L. Zharin

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STUDY OF SILICON-INSULATOR STRUCTURE DEFECTS BASED ON ANALYSIS OF A SPATIAL DISTRIBUTION OF A SEMICONDUCTOR WAFERS’ SURFACE POTENTIAL by R. I. Vorobey, O. K. Gusev, A. L. Zharin, A. N. Petlitsky, V. A. Pilipenko, A. S. Turtsevitch, A. K. Tyavlovsky, K. L. Tyavlovsky

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